专利名称: | Ceramic member and corrosion-resisting member |
公开(告)号: | |
公开(公告)日: | 2008-07-24 00:00:00 |
申请(专利)号: | US2008176735 |
申请日: | 2008-01-16 00:00:00 |
发明(设计)人: | TOTO LTD (JP) |
(申请)专利权(人): | IDE TAKAYUKI (JP);ANDO MASAMI (JP) |
内容: | A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved. |
发布日期:2008-11-14 10:08:00