专利名称: Ceramic member and corrosion-resisting member
公开(告)号:
公开(公告)日: 2008-07-24 00:00:00
申请(专利)号: US2008176735
申请日: 2008-01-16 00:00:00
发明(设计)人: TOTO LTD (JP)
(申请)专利权(人): IDE TAKAYUKI (JP);ANDO MASAMI (JP)
内容: A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved. 

发布日期:2008-11-14 10:08:00

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