专利名称: Method for producing a ceramic diaphragm structure
公开(告)号:
公开(公告)日: 2007-02-22 00:00:00
申请(专利)号: DE19996034750(DE69934750D)
申请日: 1999-09-13 00:00:00
发明(设计)人: NGK INSULATORS LTD (JP)
(申请)专利权(人): TAKEUCHI YUKIHISA (JP);TAKEUCHI KATSUYUKI (JP)
内容: A method for forming a ceramic diaphragm structure includes the steps of: a) providing a laminate, comprising: i) a ceramic green substrate having at least one window therethrough and a plurality of layers; and ii) a thin ceramic green sheet having at least one layer superposed on the ceramic green substrate to cover the at least one window; and b) firing the laminate so that the ceramic green sheet provides a diaphragm portion protruding in a direction away from the at least one window; wherein the ceramic green substrate and the ceramic green sheet satisfy the formulae: 1) S(substrate) - S(sheet> >/= - 0.08?T70(substrate) - T70(sheet)ü - 1 2) 0 

发布日期:2007-08-22 16:11:00

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