专利名称: | CERAMIC SYNTHESIS METHOD |
公开(告)号: | |
公开(公告)日: | 2007-02-22 00:00:00 |
申请(专利)号: | WO2005RU00421(WO2007021214) |
申请日: | 2005-08-16 00:00:00 |
发明(设计)人: | OTKRYTOE AKTSYONERNOE OBSHCHES (RU) |
(申请)专利权(人): | ABDUEV ASLAN KHAJIMURATOVICH (RU) |
内容: | The invention can be used for producing ceramic targets in the form of a material sources for magnetron, electron-beam, ion-beam and other film applying methods in micro-, opto- and nano-electronics. The aim of said invention is to reduce the doping level of ceramics by non-controllable impurities, to increase a ceramic material density and to improve performance characteristics of ceramic targets. The inventive method for synthesising a ceramic material doped by a low melting metal consists in pressing and sintering a component mixture, in which a doping additive is embodied in the form a low melting metal, in covering and moistening the surfaces of main component particles by the doping metal layer by rubbing the component mixture prior to pressing. The rubbing can be carried out at the low-melting material melting temperature. In a special case, for synthesising zinc oxide ceramic material, the mixture of zinc oxide powder with gallium is rubbed at a gallium melting point. The component mixture can contain a bore compound formed by bore oxide sintering in the form of a bonding agent and doping impurity. |
发布日期:2007-08-23 10:02:00