首页>>国外专利>>LOW-THERMAL EXPANSION/HIGH-SPECIFIC RIGIDITY CERAMIC, ITS PRODUCTION METHOD, AND ELECTROSTATIC CHUCK
| 专利名称： | LOW-THERMAL EXPANSION/HIGH-SPECIFIC RIGIDITY CERAMIC, ITS PRODUCTION METHOD, AND ELECTROSTATIC CHUCK |
| 公开（告）号： | |
| 公开（公告）日： | 2006-12-28 00:00:00 |
| 申请（专利）号： | JP2005175358 （ JP2006347802） |
| 申请日： | 2005-06-15 00:00:00 |
| 发明（设计）人： | NIPPON STEEL CORP |
| (申请)专利权（人）： | ANDO AKIRO ; SATO YUTAKA |
| 内容： | To supply a material capable of providing an electrostatic chuck which is excellent in dimensional stability, can obtain high surface precision and is drivable at high speed and low voltage. ! The low-thermal expansion/high-specific rigidity ceramic sintered body being the above material has the chemical composition of, by mass, 8-17.2% MgO, 22-38% Al2O3, 49.5-65% SiO2, 0.1-2.5% Li2O and 0.1-1% Ti compound (in terms of TiO2), and has the chemical-composition mass ratios of (SiO2-8×Li2O)/MgO≥3 and (SiO2-8×Li2O)/Al2O3≥1.2. Further, the sintered body has the absolute value of thermal expansion coefficient at room temperature (23°C) of ≤6×10-7/°C, Young's modulus of ≥100 GPa, specific rigidity of ≥40 GPa×cm3/g and volume resistivity of ≥1×109 Ωcm but <1×1011 Ωcm. ! (C)2007,JPO&INPIT |
发布日期：2007-07-19 08:54:00