专利名称: | Method of making thin film capacitors on ceramic substrate |
公开(告)号: | |
公开(公告)日: | 2007-04-19 00:00:00 |
申请(专利)号: | DE200460005145T(DE602004005145D) |
申请日: | 2004-12-17 00:00:00 |
发明(设计)人: | DU PONT (US) |
(申请)专利权(人): | BORLAND WILLIAM J (US) |
内容: | Thin-film capacitors are formed on ceramic substrates having high capacitance densities and other desirable electrical and physical properties. The capacitor dielectrics are annealed at high temperatures of at least about 800 DEG C. |
发布日期:2007-08-27 10:45:00