专利名称: Thin film ceramic thermocouples
公开(告)号:
公开(公告)日: 2007-03-15 00:00:00
申请(专利)号: US20060529127(US2007056624)
申请日: 2006-09-28 00:00:00
发明(设计)人:
(申请)专利权(人): GREGORY OTTO (US);FRALICK GUSTAVE (US)
内容: A thin film ceramic thermocouple ( 10 ) having two ceramic thermocouple ( 12, 14 ) that are in contact with each other in at least on point to form a junction, and wherein each element was prepared in a different oxygen/nitrogen/argon plasma. Since each element is prepared under different plasma conditions, they have different electrical conductivity and different charge carrier concentration. The thin film thermocouple ( 10 ) can be transparent. A versatile ceramic sensor system having an RTD heat flux sensor can be combined with a thermocouple and a strain sensor to yield a multifunctional ceramic sensor array. The transparent ceramic temperature sensor that could ultimately be used for calibration of optical sensors.

发布日期:2007-08-23 15:20:00

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