专利名称: | Thin film ceramic thermocouples |
公开(告)号: | |
公开(公告)日: | 2007-03-15 00:00:00 |
申请(专利)号: | US20060529127(US2007056624) |
申请日: | 2006-09-28 00:00:00 |
发明(设计)人: | |
(申请)专利权(人): | GREGORY OTTO (US);FRALICK GUSTAVE (US) |
内容: | A thin film ceramic thermocouple ( 10 ) having two ceramic thermocouple ( 12, 14 ) that are in contact with each other in at least on point to form a junction, and wherein each element was prepared in a different oxygen/nitrogen/argon plasma. Since each element is prepared under different plasma conditions, they have different electrical conductivity and different charge carrier concentration. The thin film thermocouple ( 10 ) can be transparent. A versatile ceramic sensor system having an RTD heat flux sensor can be combined with a thermocouple and a strain sensor to yield a multifunctional ceramic sensor array. The transparent ceramic temperature sensor that could ultimately be used for calibration of optical sensors. |
发布日期:2007-08-23 15:20:00