| 专利名称： | CERAMIC POLISHING PAD DRESSER AND METHOD FOR FABRICATING THE SAME |
| 公开（告）号： | |
| 公开（公告）日： | 2007-03-01 00:00:00 |
| 申请（专利）号： | US20060466716(US2007049185) |
| 申请日： | 2006-08-23 00:00:00 |
| 发明（设计）人： | KINIK COMPANY (TW) |
| (申请)专利权（人）： | LIN HSIU-YI (TW);TSENG CHOU-CHIH (TW) |
| 内容： | A ceramic polishing pad dresser and the method for fabricating the same are provided. Abrasive particles are adhered onto a ceramic substrate by heating a ceramic powder to be vitrified, thus forming a ceramic diamond disk. Meanwhile, a plastic base is mounted on the bottom of the ceramic diamond disk. As for heating the ceramic powder to be vitrified, the ceramic powder with low melting point is disposed on the ceramic substrate, and to be heated to form a vitrified adhering layer, so as to adhere the abrasive particles disposed thereon to the ceramic substrate. The plastic base mounted on the bottom of the ceramic diamond disk is provided for bearing the ceramic diamond disk and has corresponding screw holes and positioning holes formed thereon for fitting the chemical mechanical polishing table to be mounted and reducing the manufacturing cost. |
发布日期：2007-08-23 15:59:00