专利名称: | Laminate ceramic coil former |
公开(告)号: | |
公开(公告)日: | 2007-03-07 00:00:00 |
申请(专利)号: | GB20050017859(GB2429834) |
申请日: | 2005-09-02 00:00:00 |
发明(设计)人: | NANOBEAM LTD (GB) |
(申请)专利权(人): | ZHANG TAO (GB) |
内容: | A coil former (1) comprising a plurality of ceramic plates (2) arranged to form a laminate (3) between first and second ends (4, 5), each plate having an opening therein such that when the plates are arranged in the laminate, a passage (7) is defined between the first and second ends. The coil former can be used in apparatus such as electron microscopes, electron lithography devices and ion implantation devices. |
发布日期:2007-08-24 08:42:00