专利名称: Laminate ceramic coil former
公开(告)号:
公开(公告)日: 2007-03-07 00:00:00
申请(专利)号: GB20050017859(GB2429834)
申请日: 2005-09-02 00:00:00
发明(设计)人: NANOBEAM LTD (GB)
(申请)专利权(人): ZHANG TAO (GB)
内容: A coil former (1) comprising a plurality of ceramic plates (2) arranged to form a laminate (3) between first and second ends (4, 5), each plate having an opening therein such that when the plates are arranged in the laminate, a passage (7) is defined between the first and second ends. The coil former can be used in apparatus such as electron microscopes, electron lithography devices and ion implantation devices. 

发布日期:2007-08-24 08:42:00

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