首页>>国外专利>>THERMALLY CONDUCTIVE DIELECTRIC BONDING OF SPUTTERING TARGETS USING DIAMOND POWDER FILLER OR THERMAL
专利名称: | THERMALLY CONDUCTIVE DIELECTRIC BONDING OF SPUTTERING TARGETS USING DIAMOND POWDER FILLER OR THERMAL |
公开(告)号: | |
公开(公告)日: | 2007-03-22 00:00:00 |
申请(专利)号: | WO2006US31989(WO2007032855) |
申请日: | 2006-08-15 00:00:00 |
发明(设计)人: | APPLIED MATERIALS INC (US)YE YAN (US) |
(申请)专利权(人): | YE YAN (US);WHITE JOHN M (US) |
内容: |
发布日期:2007-08-27 08:45:00