首页>>国外专利>>THERMALLY CONDUCTIVE DIELECTRIC BONDING OF SPUTTERING TARGETS USING DIAMOND POWDER FILLER OR THERMAL
| 专利名称: | THERMALLY CONDUCTIVE DIELECTRIC BONDING OF SPUTTERING TARGETS USING DIAMOND POWDER FILLER OR THERMAL |
| 公开(告)号: | |
| 公开(公告)日: | 2007-03-22 00:00:00 |
| 申请(专利)号: | WO2006US31989(WO2007032855) |
| 申请日: | 2006-08-15 00:00:00 |
| 发明(设计)人: | APPLIED MATERIALS INC (US)YE YAN (US) |
| (申请)专利权(人): | YE YAN (US);WHITE JOHN M (US) |
| 内容: |
发布日期:2007-08-27 08:45:00